Micro-Spectrophotometer
USPM-RU-W

Near Infrared Micro-Spectrophotometer. Fast Measurements of Curves Surfaces and Minute Areas

 

Measurements of Curves Surfaces and Minute Areas

USPM-RU-W NIR Micro-Spectrophotometer performs fast, accurate spectrometry across a wide range of wavelengths of visible light to near-infrared.The ability to easily measure reflectivity of extremely small areas or curved surfaces that cannot be measured using ordinary spectrophotometers, makes the USPM-RU-W optimally suited for analyzing optical elements or minute electronics parts.

Measure Reflectivity

Left Image: example of reflectivity measurement : lens

Right Image: example of reflectivity measurement : lens curvature

Near-Infrared Micro-Spectrophotometer

■ Reflectivity, Film thickness, Object color, and transmittance measured in seconds
■ Wide range of wavelength from 380 to 1050 nm
■ Measures reflectivity on curved surface without contact

Measure Transmission Levels 

(Available as an option)

Image: Optical Path of Transmittance Measurement

Measure the transmittance of a plane sample by transmitting 2 mm parallel beams of lights through the sample to the spectrophotometry acceptance elements.

Measure Reflectivity at an Incidence Angle of 45 Degrees
(Available as an option)

Image: Optical Path of 45-degree Reflectivity Measurement

Measure the reflectivity at an incidence angle of 45 degrees by reflecting 2 mm parallel beams of lights to the spectrophotometry acceptance elements.
Measure Film Thickness

Image: Film Thickness Measurement Screen-shot

Use reflectivity data to measure the thickness of single-layer or multi-layer films of approximately 50 nm to 10 μm.

Measure Object Color

Image: Object Color Measurement Screen-shot

Display an XY chromaticity diagram, an L*a*b* chromaticity diagram, and their related numeric values based on reflectivity data.

Fast Measurements of Curves Surfaces and Minute Areas
Provides High-speed Measurement

Quick, high repeatability measurements can be achieved in seconds using a flat field grating, line sensor and high-speed spectrophotometry.

Provides High-speed Measurement

Quick, high repeatability measurements can be achieved in seconds using a flat field grating, line sensor and high-speed spectrophotometry.

Optimally Suited for Reflectivity

Measurement of Extremely Small Parts and LensesOlympus has designed a new dedicated objective lens that provides non-contact measurements across an area of 17 to 70 μm diameters. The new lens provides high repeatability on even curved surfaces or minute electronic parts.

Anti-reflection Processing is Not Required on the Back of the Sample

Accurate measurement of surface reflectivity can be performed without the costly steps needed to prevent rear surface reflection. Rear surface-reflected light is reduced by means of special optics that block all out-of-focus light reflection similar to a confocal system. Whether your optical component is spherical,aspherical or flat, the USPM-RU-W does not require sample preparation through anti-reflection treatments.

Available Film Thickness Measurement Methods
The single-layer or multi-layer film thickness can be analyzed according to the measured spectral reflectivity data. You can select the optimum measurement method for the application.
Peak-valley Method

This method is used to calculate film thickness based on the periods between the peaks and valleys of the measured spectral reflectivity value, and is effective for measuring single-layer film. No complicated settings are required, so measuring film thickness is easy.

Fourier Transform Method

This method is used to calculate film thickness based on the periods between measured spectral reflectivity values, and is effective for measuring single-layer and multilayer films. The Fourier transform method eliminates noise, thus making analysis possible when it is difficult to detect peak and valley values.

Curve Fit Method

This method is used to calculate film thickness by estimating which structure has the smallest difference between the measured spectral reflectivity and the calculated reflectivity for that structure, and is effective for measuring single-layer and multilayer films. The curve fit method also makes it possible to analyze thin film in which peak and valley values are not apparent.

Spectral Analysis Software

An easy-to-use user interface

Easy-to-understand Display

Image: An example of GUI layout

Change the layout and position, size, and visibility of each window according to the measurement purpose and user needs.

Diverse Measurement Results

Image: Reflectivity/transmittance graph, reflectivity/transmittance text, XY/L*a*b* chromaticity diagram

Spectral reflectivity/transmissivity graphs and text, color measurement (XY and L*a*b* chromaticity diagrams), and film thickness measurement values can be displayed on one screen for easy understanding.

Easy Focus Adjustment
Image: Focus adjustment

Positioning the measuring point is easy by using a focusing window for Z axis alignment and centering (CT) window for X and Y axis alignment..
Easy Position Adjustment
Image: Position Adjustment

Positioning the measuring point is easy by using a focusing window for Z axis alignment and centering (CT) window for X and Y axis alignment.
Flexibility for Any Application

Image: Work setting, layer setting, graph setting, parameter setting

The USPM-RU-W software can be configured to achieve optimum performance for your specific sample

Tolerance setting function of automatic pass / fail determination
Image: An example of reflectivity measurement with Tolerance setting function

System can be configured to provide good / no good designations automatically.
Diverse application
Satisfies Diverse Measurement Needs at High Speed and With High Precision
Evaluation of Lens Coating for reflectivity,color and film thickness.

Mobile Phone Camera Lenses
Projector Lenses
Digital Camera Lenses
Spectacle Lenses

Examining the Reflectivity and Film Thickness of Minute Electronic Parts.

LED Packages
Printed Circuit Boards

Reflectivity, Film Thickness and Transmittance measurment of Planar Optical Elements.

LCD color filters
Optical films

Optical Elements Reflectivity at an Incident Angle of 45 Degrees.

Prisms
Mirrors

 

Reflectivity measurement

Transmittance Measurement*1

Reflectivity Measurement for 45-Degrees*1

 

Name

NIR Micro-Spectrophotometer

Transmittance measurement set for
NIR Micro-Spectrophotometer

45-degree reflectance measurement set for
NIR Micro-Spectrophotometer

 

Model

USPM-RU-W

 

Measured wavelength

380 to 1050 nm

 

Measurement method

Compared with a reference sample for measurement

Transmissivity is measured with 100% as standard

Compared with a reference sample for measurement

 

Measurement range

See the specifications of the objective lens below

Approx. 2.0 mm in diameter

 

Measurement repeatability(3σ) *2

Reflectivity measurement

During use of 10x and 20x objective lenses

±0.02% or less (430 to 1010 nm)
±0.2% or less (Except as described above)

±0.3% or less (430 to 1010 nm)
±1.0% or less (Except as described above)

 

During use of a 40x objective lens

±0.05% or less (430 to 950 nm)
±0.5% or less (Except as described above)

 

 

Film thickness measurement

±1% 

-

 

Wavelength display resolution

1nm

 

Lighting accessory

Dedicated halogen light source, JC12V 55W (Average life: 700 hours)

 

Shift stage

Loading surface size: 200 (W) x 200 (D) mm
With stand load: 3 kg
Operating range: (XY) ±40 mm, (Z) 125 mm

 

Tilt stage

Loading surface size: 140 (W) x 140 (D) mm
Withstand load: 1 kg
Operating range: (XT) ±1*, (YT) ±1*

 

Weight

Main body: Approx. 26 kg (not including PC)

Main body: Approx. 31 kg (not including PC)*3

 

Control power box: Approx. 6.7 kg

 

Dimensions

Main body: 360 (W) x 446 (D) x 606 (H) mm

Main body: 360 (W) x 631 (D) x 606 (H) mm

 

Control power box: 250 (W) x 270 (D) x 125 (H) mm (Protruding parts are not included)

 

Power specifications

Input specifications: AC 100-240V (110V) 50/60Hz

 

Operating environment

Horizontal place not subject to vibration
Temperature: 15 ºC to 30 ºC
Humidity: 15% to 60% RH (Free from dew condensation)

 
 

 

 

 

*1 Optional unit *2 Measured under the measurement conditions of our company. *3 The total weight of both the transmissivity measurement set and 45-degrees reflectivity measurement set installed is approx. 33 kg.


Objective lens

Model

USPM-OBL10X

USPM-OBL20X

USPM-OBL40X

Magnification

10x

20x

40x

Measurement NA*4

0.12

0.24

0.24

Measurement range*5

70μm

35μm

17.5μm

Operating distance

14.3mm

4.2mm

2.2mm

Operating distance

±5 mm or more

±1 mm or more

±1 mm or more

*4 It differs from objective lens' NA.
*5 Spot diameter

 

Specification are subject to change without notice or obligation on the part of the manufacturer