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Semiconductor & Panel Display Inspection Microscopes
MX63. MX63L

Large Travel Inspection Microscope

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Meeting the Needs of the Electronics Industry
Functional

Designed to meet the ergonomic and safety requirements of the electronics industry. Large travel: 356mm by 305mm 

User-Friendly

Simplified microscope settings make it easier for users to adjust and reproduce system settings

Advanced Imaging Technology

Our proven optics and exceptional imaging technology deliver clear images and reliable inspections

Modular

Users can customize their system with the components that suit their application

7 observation methods for your applications
NIR inspection on IC

Infrared observation can be conducted with the IR objective lenses, which enable the operators to nondestructively inspect the inside of IC chips packed and mounted on a PCB, utilizing the characteristics of silicon that transmit infrared light. 5X to 100X IR objectives are available with chromatic aberration correction from visible light wavelengths through the near infrared. Especially with an objective lens of 20X or more, the aberration caused by the silicon layer covering the observation object can be corrected by the correction collar to obtain a clear image.

Darkfield , Darkfield+Brightfield (MIX)
IC pattern on a semiconductor wafer

Darkfield is used for detecting minute scratches or flaws on a sample or inspecting samples with mirrored surfaces, such as wafers. MIX illumination enables users to view both patterns and colors.
Fluorescence, Fluorescence+Darkfield (MIX)

Photoresist residue on a semiconductor wafer

Fluorescence is used for samples that emit light when illuminated with a specially designed filter cube. This is used to detect contamination and photoresist residue. MIX illumination enables the observation of both the photoresist residue and IC pattern.

Brightfield, DIC

A hard disk

Differential interference contrast (DIC) is used to help view samples with minute height differences. It is ideal for inspections of samples having very minute height differences such as magnetic heads, hard-disk media, and polished wafers.

Brightfield, Polarized Light

Film

Polarized light is used to reveal a material’s texture and the condition of crystals. It is suitable for inspections of wafer and LCD structures.

Transmitted, Transmitted+BF (MIX)

An LCD color filter

This observation technique is suitable for transparent samples such as LCDs, plastics, and glass materials. MIX illumination enables the observation of both the filter color and circuit pattern.

Faster Observations via the Light Intensity Manager and Automatic Aperture Control
Manual Adjustment

In normal microscopes, users need to adjust the light intensity and aperture for every observation.


Automatic Control
The MX63 series enables users to set up the light intensity and aperture conditions for different magnifications and observation methods. These settings can be easily recalled, helping users save time and maintain optimal image quality.
Manual Adjustment

The image gets too bright or dark when changing magnification or observation method.

User need to adjust to optimum brightness when changing from Brightfield to Darkfield


Automatic Control
The light intensity is automatically adjusted to produce the optimal image when changing magnification or observation method.

Light intensity is automatically adjusted when changing from Brightfield to Darkfield
Two Systems Accommodate Diverse Sample Sizes
The MX63 series is designed to enable the customer to choose a variety of optical components to suit individual inspections and application needs. The system can utilize all observation methods. Users can also select from a variety of PRECiV image analysis packages to suit individual image acquisition and analysis needs.
MX63

8" Travel microscope ( Stroke: 210mm x 210mm )

Chose from the wide range of accessories from 6&8 inch wafer holder or stage suitable for panel inspection.

  • 3 & 4 inch wafer holder
  • 4 & 5 inch wafer holder
  • 5 & 6 inch wafer holder
  • 6 & 8 inch stage
  • 6 & 8 inch rotatable wafer holder
  • Flat reflected stage plate
  • Glass stage plate
MX63L

12" Travel microscope (Stroke: 356mm x 305mm)

Chose from the wide range of accessories from 6&8, 8&12 inch wafer holder. The modular design makes it easy to customize the microscope for your specific requirements

  • 6 & 8 inch stage
  • 6 & 8 inch rotatable wafer holder
  • 8 & 12 inch stage
  • 8 & 12 inch rotatable wafer holder
  • 6" x 6" mask holder
  • Glass stage plate
Ergonomic and Advanced Designed to Support Cleanroom Conformity
The MX63 series is designed to work in a cleanroom and has features that help minimize the risk of contaminating or damaging samples. The system has an ergonomic design that helps keep users comfortable, even during prolonged use. The MX63 series complies with international specifications and standards, including SEMI S2/S8, CE, and UL.
Antistatic breath shield
The MX63 series delivers contamination-free wafer inspections. All motorized components are housed in a shielded structure, and antistatic processing is applied to the microscope frame, tubes, breath shield, and other parts.
Motorized nosepiece
The rotation speed of the motorized nosepieces is faster and safer than manual nosepieces, decreasing the time between inspections while keeping the operator's hands below the wafer, reducing potential contamination.
Stage handle with built-in clutch
The XY stage is capable of both coarse and fine stage movements thanks to the combination of a built-in clutch and the XY knobs. The stage helps make observations efficient, even for large samples, such as 300 mm wafers.
The tilting observation tube providing comfortable posture

The tilting observation tube’s extensive range enables operators to sit at the microscope in a comfortable posture.

Centralized microscope operation
The controls for changing the objective and adjusting the aperture stop are positioned low and in the front of the microscope so users don’t have to let go of the focusing knobs or move their head away from the eyepieces during use.
Wafer holders and glass plates
Various types of 150–200 mm and 200–300 mm wafer holders and glass plates. Should the size of the wafers change on the production line, the microscope’s frame can be modified at minimal cost. With the MX63 series, different stages can be used to accommodate 75 mm, 100 mm, 125 mm, and 150 mm wafers on the inspection line.

 

MX63

MX63L

Optical system

UIS2 optical system (infinity-corrected system)

Microscope frame

Reflected light illumination

White LED(with Light Intensity Manager) 12 V 100 W halogen lamp, 100W mercury lamp, light guide source
Brightfield/darkfield/mirror cube manual changeover. (Mirror cube is optional.)
3 position coded mirror units changed by manual operation
Built-in motorized aperture diaphragm (Pre-setting for each objective, automatically full open for darkfield)
Observation mode: brightfield, darkfield, differential interface contrast (DIC)*1, simple polarizing*1, fluorescence*1, IR and MIX observation(4 directional darkfield)*2
*1 Optional mirror cube, *2 MIX observation configuration is required

Transmitted light illumination

Transmitted light illumination unit: MX-TILLA or MX-TILLB is required.
- MX-TILLA: a condenser (NA 0.5) and an aperture stop
- MX-TILLB: a condenser (NA 0.6), an aperture stop and a field stop
Light source: LG-LSLED (LED light source) Light guide: LG-SF    
Observation mode: brightfield, simple polarizing

Focus

Stroke: 32 mm
Fine stroke per rotation: 100 μm
Minimum graduation: 1μm
Upper limit stopper and torque adjustment for coarse handle

Maximum load weight (including stage and holder)

8 kg

15 kg

Observation tube

Wide-field (FN 22 mm)

Erect and trinocular: U-ETR4
Erect, tilting and trinocular: U-TTR-2
Inverted and trinocular: U-TR30-2, U-TR30IR (for IR observation)
Inverted and binocular: U-BI30-2
Inverted, tilting and binocular: U-TBI30

Super-wide-field (FN 26.5 mm)

Erect, tilting and trinocular: MX-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 0 : 100%)
Erect, tilting and trinocular: U-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 20% : 80%)
Inverted and trinocular: U-SWTR-3

Motorized nosepiece

Brightfield
Motorized sextuple with a slider slot for DIC: U-D6REMC
Motorized centerable quintuple with a slider slot for DIC: U-P5REMC

Brightfield and darkfield
Motorized sextuple with a slider slot for DIC: U-D6BDREMC
Motorized quintuple with a slider slot for DIC: U-D5BDREMC
Motorized centerable quintuple with a slider slot for DIC: U-P5BDREMC
Motorized with vacuum：U-D5BDREMC-VA

Stage (X × Y)

Coaxial right handle with built-in clutch drive: MX-SIC8R
Stroke: 210 x 210 mm
Transmitted light illumination area: 189 x 189 mm

Coaxial right handle with built-in clutch drive: MX-SIC6R2
Stroke: 158 x 158 mm
(Reflected light use only)

Coaxial right handle with built-in clutch drive: MX-SIC1412R2
Stroke: 356 x 305 mm
Transmitted light illumination area: 356 x 284 mm

Weight

Approx. 35.6kg（Microscope frame 26kg）

Approx. 44kg（Microscope frame 28.5kg）

Specification are subject to change without notice or obligation on the part of the manufacturer

Integrating Microscopy into Automated Microelectronics Manufacturing
Capabilities of Near-Infrared Imaging for Electronics and Semiconductor Inspection