Semiconductor & Panel Display Inspection Microscopes
AL120-8
8″ – 6″ Auto Wafer Loader. Fast, safe transfer of wafers for macro and micro inspection
Models
Fast and Safe transfer Inspection for 8 and 6 inch wafer
The AL120 wafer loader series provides fast, safe transfer of both silicon and compound semiconductor wafers from the cassette to the microscope stage. Designed to increase product throughput, the wafer handler combines with our MX63 semiconductor microscope for a reliable wafer inspection solution.
Supports Thin Wafer Handling and Inspection
To meet the demands of thin wafer manufacturers, the arm design of the AL120-LMB-90 model can handle a full cassette of 90 µm wafers.
Enhanced MACRO inspection - 360 degree rotation
- A 360-degree self-rotating function provides a complete macro inspection of the wafer's top and back surface, enabling easy identification of defects and particles.
- The built-in joystick controls the tilt of the wafer during topside macro inspection. Operators can adjust the angle of the wafer to optimize inspection results.
Easy and Straightforward operation
- To meet the demands of varying inspection routines, the AL120 wafer loader is recipe driven with 10 programmable system configurations, including specific cassette types, wafer specifications, and transfer speeds. Quick push button selection lets the operator load different products instantly.
- Wafer handler parameters and recipe settings are visible on the LCD display. Operators can confirm routines and results before and after the inspection.
| AL120 Wafer Loader Specifications*1 | ||||||||
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200 mm Type | 200 mm / 150 mm Convertible Type | 150 mm Type | |||||
| AL120- LMB8- 90 |
AL120- LMB86- 180 |
AL120- LMB8 |
AL120- LMB6- 150 |
AL120- L6- 150 |
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| Wafer Size (SEMI Standard) | 200 mm |
200 mm / 150 mm
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150 mm / 125 mm / 100 mm |
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| Minimum Wafer Thickness | 90 µm | 180 µm | 400 µm | 150 µm | ||||
| Type of Cassette | SEMI stad. 25 (26)-slot | |||||||
| Number of Cassettes | 1 | |||||||
| Inspection Recipe | All / Sampling |
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| Inspection Sequence | Micro (Microscope) | YES | YES | YES | YES | YES | ||
| Top Macro | YES | YES | YES | YES |
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| Back Macro | YES | YES | YES | YES |
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| 2nd. Back Macro | YES | YES | YES | YES |
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| Wafer Orientation (Every 90°) | Non-contact (O.F./Notch) | Non-contact (O.F.) | ||||||
| Compatible Microscope Model | MX63 inspection microscope for semiconductors and flat panel displays | |||||||
| Dimensions (mm) | 640 (W) x 620 (D) x 378 (H) Body Only, 1100 (W) x 620 (D) x 378 (H) with Microscope | 570 (W) x 620 (D) x 401 (H) Body Only, 983 (W) x 620 (D) x 401 (H) with Microscope | ||||||
| Weight (kg) (Main Body Only) | 44 | 44 | 44 | 40 | 37 | |||
| Utility (Power Consumption/Vacuum) | AC100 V - 120 V, 1 A, or AC 220 V - 240 V, 0.5 A 50/60 Hz, -67 to -80 kpa, 20 Liter/min or higher | |||||||
*1 All types of wafers must be tested in advance, please contact XMICRO office
Specification are subject to change without notice or obligation on the part of the manufacturer
