3D Optical Profiler
Designed for R&D, QA, and QC teams, it delivers precise surface detail, traceable accuracy for confident measurements, and an intuitive user experience to streamline workflows.
Trusted data—powered by precision optics, verifiable calibration, and smart automation—helps labs move seamlessly from first discovery to final decision.
Infinite Surfaces, Trusted Results
The award-winning LEXT™ OLS5500 enables you to identify subtle features and surface variations with unparalleled clarity—use LSM, WLI, and FVM to detect defects, confirm designs, and make confident decisionsWhite Light Interferometric Objectives
Ideal for smooth and sloped surfaces, the system measures nanometer-scale steps with reliable constant-height performance at any objective magnification.
Clarity on Challenging Samples
4K imaging, a top-surface detection filter, laser DIC, dual pinhole optics, and a high-sensitivity sensor work together to deliver exceptional clarity, contrast, and color fidelity—even on the most challenging samples.
WLI improves throughput up to 42×
The OLS5500’s WLI improves throughput by up to 42 times compared to conventional LSM. Measure nanometer-scale surface textures—traditionally visible only at the high magnifications of an LSM—without being limited by objective magnification.
LEXT microscope objectives deliver highly accurate measurement data. Paired with the Smart Lens Advisor, you can acquire accurate data you can be confident in.
- Guaranteed measurement accuracy
- 10x to 100x objectives that reduce aberrations at 405 nm to capture the correct shape of your sample throughout the entire field of view
- Smart Lens Advisor helps you choose the right objective lens for your roughness measurement
100 mm x 100 mm
300mm x 300mm
100mm x 100mm
Contact us to find out more
100 mm x 100 mm
300mm x 300mm
100mm x 100mm
Contact us to find out more
The laser confocal optical system receives only the light focused through the circular pinhole, rather than capturing all the light reflected and scattered from the sample. This helps eliminate blur, making it possible to acquire an image with higher contrast than can be obtained with an ordinary microscope.
A laser microscope using a short-wavelength laser has better lateral resolution than a traditional microscope using visible laser light (peak value 550 nm). The OLS5100 microscope’s 405 nm laser diode offers exceptional lateral resolution.
Observe steps in the nanometer range and measure height differences at the sub-micron level.
Smart Automation for Effortless Precision
The OLS5500’s smart automation and workflow tools are designed to make surface analysis easier and faster for users of all levels. With Tilt Adjustment Assistance, tilt correction becomes simple. With one click, the software indicates the exact amount of adjustment needed to level the sample surface.
Smart Data Detection
Smart Judge automatically detects only reliable data, delivering accurate measurements without losing fine height irregularity data.
