3D profiler laser scanning confocal microscope
Built for failure analysis and material engineering research, the OLS5100 laser microscope combines exceptional measurement accuracy and optical performance with smart tools that make the microscope easy to use. Precisely measure shape and surface roughness at the submicron level quickly and efficiently to simplify your workflow with data you can trust.
Using the microscope is easy for novice and experienced users thanks to thoughtfully designed software.
- Acquire accurate data easily—put your sample on the stage and press the start button
- Measurement performance guarantee tailored to your operating environment*.
The information, including guaranteed accuracy, on this web page is based on conditions set by Evident
LEXT microscope objectives deliver highly accurate measurement data. Paired with the Smart Lens Advisor, you can acquire accurate data you can be confident in.
- Guaranteed measurement accuracy
- 10x to 100x objectives that reduce aberrations at 405 nm to capture the correct shape of your sample throughout the entire field of view
- Smart Lens Advisor helps you choose the right objective lens for your roughness measurement
Continuous auto focus
The microscope’s continuous autofocus keeps your images in focus when moving the stage or changing objectives, minimizing the need for manual adjustments. Permanent focus tracking enables you to perform observations quickly and easily.
Dual DIC for nano-scale, real-time observation
Detect minute damage in your sample with real-time, nanometerscale observation. Differential interference contrast (DIC) observation enables you to visualize nanometer-scale surface contours that are normally beyond the resolving power of a laser microscope. With DIC laser mode, the OLS5100 microscope can obtain live images comparable to those of an electron microscope, even when using a 5x or 10x low-power objective.
•Left Image: Back surface of wafer •Right Image: Hard disk landing zone
100 mm x 100 mm
300mm x 300mm
100mm x 100mm
100mm x 100mm
Contact us to find out more
100 mm x 100 mm
300mm x 300mm
100mm x 100mm
100mm x 100mm
Contact us to find out more
The laser confocal optical system receives only the light focused through the circular pinhole, rather than capturing all the light reflected and scattered from the sample. This helps eliminate blur, making it possible to acquire an image with higher contrast than can be obtained with an ordinary microscope.
A laser microscope using a short-wavelength laser has better lateral resolution than a traditional microscope using visible laser light (peak value 550 nm). The OLS5100 microscope’s 405 nm laser diode offers exceptional lateral resolution.
Observe steps in the nanometer range and measure height differences at the sub-micron level.
| Model | OLS5100-SAF | OLS5100-SMF | OLS5100-LAF | OLS5100-EAF | |
|---|---|---|---|---|---|
| Total magnification |
54x–17,280x |
||||
| Field of view |
16 µm–5,120 µm |
||||
| Measurement principle | Optical system | Reflection-type confocal laser scanning laser microscope Reflection-type confocal laser scanning laser-DIC microscope Color Color-DIC |
|||
| Light receiving element | Laser: Photomultiplier (2 channels) Color: CMOS color camera |
||||
| Height measurement | Display resolution | 0.5 nm | |||
| Dynamic range | 16 bits | ||||
| Repeatability σn-1*1 *2 *5 | 5X: 0.45 μm, 10X: 0.1 μm, 20X: 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm | ||||
| Accuracy *1 *3 *5 | 0.15+L/100 μm (L:Measuring length[μm]) | ||||
| Accuracy for stitched image *1 *3 *5 | 10X: 5.0+L/100 μm, 20X or higher: 1.0+L/100 μm (L: Stitching length [μm]) | ||||
| Measurement noise (Sq noise) *1 *4 *5 | 1 nm (Type) | ||||
| Width measurement | Display resolution | 1 nm | |||
| Repeatability 3σn-1 *1 *2 *5 |
5X: 0.4 μm, 10X: 0.2 μm, 20X: 0.05 μm, 50X: 0.04 μm, 100X: 0.02 μm |
||||
| Accuracy *1 *3 *5 | Measurement value +/- 1.5% | ||||
| Accuracy for stitched image *1 *3 *5 | 10X: 24+0.5L μm, 20X: 15+0.5L μm, 50X: 9+0.5L μm, 100X: 7+0.5L μm (L: Stitching length [mm]) | ||||
| Maximum number of measuring points in a single measurement |
4096 × 4096 pixels |
||||
| Maximum number of measuring points |
36-megapixels |
||||
| XY stage configuration | Length measurement module | • | NA | NA | • |
| Operating range |
100 × 100 mm (3.9 × 3.9 in.) Motorized |
100 × 100 mm (3.9 × 3.9 in.) Manual |
300 × 300 mm (11.8 × 11.8 in.) Motorized |
100 × 100 mm (3.9 × 3.9 in.) Motorized |
|
| Maximum sample height |
100 mm (3.9 × 3.9 in.) |
40 mm (1.6 in.) |
37 mm (1.5 in.) |
210 mm (8.3 in.) |
|
| Laser light source | Wavelength | 405 nm | |||
| Maximum output | 0.95 mW | ||||
| Laser class | Class 2 (IEC60825-1:2007, IEC60825-1:2014)*6 | ||||
| Color light source | White LED | ||||
| Electrical power | 240 W | 240 W | 278 W | 240 W | |
| Mass | Microscope body | Approx. 31 kg (68.3 lb) | Approx. 32 kg (70.5 lb) | Approx. 50 kg (110.2 lb) | Approx. 43 kg (94.8 lb) |
| Control box | Approx. 12 kg (26.5 lb) | ||||
*1 Guaranteed when used in constant temperature and constant-humidity environment (temperature: 20˚C±1˚C, humidity: 50%±10%) specified in ISO554(1976), JIS Z-8703(1983).
*2 For 20x or higher, when measured with MPLAPON LEXT series objectives.
*3 When measured with dedicated LEXT objective.
*4 Typical value when measured with MPLAPON100XLEXT objective, and may differ from the guaranteed value.
*5 Guaranteed under Evident Certificate System.
*6 OLS5100 is a Class 2 laser product. Do not stare into beam.
** The OS license of Window 10 has been certified for the microscope controller provided by Evident. Therefore, Microsoft's license terms are applied and you agree to the terms.Please refer to the following for Microsoft license terms.
https://www.microsoft.com/en-us/Useterms/Retail/Windows/10/UseTerms_Retail_Windows_10_english.htm
| Series | Model | Numerical Aperture (NA) | Working Distance (WD) (mm) |
|---|---|---|---|
| UIS2 objective lens | MPLFLN2.5X | 0.08 | 10.7 |
| MPLFLN5X | 0.15 | 20 | |
| Dedicated LEXT objective lens (10X) | MPLFLN10XLEXT | 0.3 | 10.4 |
| Dedicated LEXT objective lens (high-performance type) | MPLAPON20XLEXT | 0.6 | 1 |
| MPLAPON50XLEXT | 0.95 | 0.35 | |
| MPLAPON100XLEXT | 0.95 | 0.35 | |
| Dedicated LEXT objective lens (long working distance type) | LMPLFLN20XLEXT | 0.45 | 6.5 |
| LMPLFLN50XLEXT | 0.6 | 5.2 | |
| LMPLFLN100XLEXT | 0.8 | 3.4 | |
| Super long working distance lens | SLMPLN20X | 0.25 | 25 |
| SLMPLN50X | 0.35 | 18 | |
| SLMPLN100X | 0.6 | 7.6 | |
| Long working distance for LCD lens | LCPLFLN20XLCD | 0.45 | 8.3-7.4 |
| LCPLFLN50XLCD | 0.7 | 3.0-2.2 | |
| LCPLFLN100XLCD | 0.85 | 1.2-0.9 |
Specification are subject to change without notice or obligation on the part of the manufacturer
